Bekpulatov, I, A.S. Rysbaev, Sh.Kh. Dzhuraev, and A.S. Kasymov. “Development of Thermal Sensors by Implantation Ions P+ and B+ in Different Sides of Si(111)”. Eurasian Journal of Physics and Functional Materials 2, no. 4 (March 3, 2026). Accessed March 10, 2026. https://ephys.kz/index.php/journal/article/view/102.