Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

Abstract

Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li₃PO₄ target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, N_d , and possibly triply, N_t, coordinated form. The ac impedance spectroscopy measurements revealed that the highest ionic conductivity of 1.1 µScm^-1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.

Recommended Citation

Uzakbaiuly, B.; Mukanova, A.; Kurmabbayeva, I.; and Bakenov, Z. B. (2019) "Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)," Eurasian Journal of Physics and Functional Materials: Vol. 3: No. 2, Article 9.
DOI: https://doi.org/10.29317/ejpfm.2019030209