Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)
Abstract
Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were determined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, Nd , and possibly triply, Nt, coordinated form. The ac impedance spectroscopy measurements revealed that the highest ionic conductivity of 1.1 µScm-1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.
Recommended Citation
Uzakbaiuly, B.; Mukanova, A.; Kurmabbayeva, I.; and Bakenov, Z. B. (2019) "Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)," Eurasian Journal of Physics and Functional Materials: Vol. 3: No. 2, Article 9.
DOI: https://doi.org/10.29317/ejpfm.2019030209
References
Downloads
Published
Issue
Section
License
The Eurasian Journal of Physics and Functional Materials is an open-access journal. Articles published under the Creative Commons Attribution 4.0 International License (CC BY 4.0) may be shared, redistributed, and adapted, including for commercial purposes, provided that the terms of the license are followed, including appropriate attribution to the original authors and source.
License: https://creativecommons.org/licenses/by/4.0/
Copyright ownership and publication rights are governed by the terms applicable to each article and the relevant author agreement.
