UZAKBAIULY, B. Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON). Eurasian Journal of Physics and Functional Materials, [S. l.], v. 3, n. 2, 2026. Disponível em: https://ephys.kz/index.php/journal/article/view/125. Acesso em: 4 mar. 2026.