Uzakbaiuly, B, A. Mukanova, I. Kurmanbayeva, and Z.B. Bakenov. “Optimization of Deposition Parameters for Thin Film Lithium Phosphorus Oxynitride (LIPON)”. Eurasian Journal of Physics and Functional Materials 3, no. 2 (March 3, 2026). Accessed April 20, 2026. https://ephys.kz/index.php/journal/article/view/125.